Parker: Ultra Series Precision Stages

Precise multi-axis positioning systems play an integral part in today’s semiconductor, computer peripheral, solar power, flat panel, life sciences, lab automation, biomedical and electronics industries. The demands for tighter specifications, improved throughput and consistent quality have become increasingly stringent. Because of the complexity associated with these systems, many manufacturers insist on a single source supplier to eliminate multiple vendor design incompatibilities and delivery conflicts. With over forty years’ experience as a global leader in the development of products and technology, Parker provides the most advanced, easy to integrate high-precision electromechanical systems.

When to Use:
• High-precision sub micron
• Precise repeatability
• Open or closed frame
• Thermal compensation
• Smooth motion

Applications:
• Electronics
• Semiconductor
• Automation
• Medical
• Flat panel

Linear Motor Driven or Screw-Driven Styles
Linear Motor Ultra Stages can achieve sub-micron accuracy with position repeatability of +1 encoder count. Featuring Parker’s patented AutoFlex Preload, Linear Motor Ultra Stages provide exceptional smoothness of motion for constant velocity requirements in scanning applications. The AutoFlex preload provides a unique thermal compensation method, eliminating any effects of expansion/ contraction on bearing performance. The brushless linear motor is mounted inverted, with the ironless coil attached to the stationary base, eliminating moving wires.

Traditional Ultra Stages are provided with either a ballscrew or lead screw mounted alongside the stage. This stage configuration allows easy mounting of any step or servo motor with a flexible coupling. The ballscrew version provides high-speed and high force for dynamic move-and-settle applications. The lead screw version provides exceptional smoothness for slow-speed scanning. Both the lead screw and ballscrew models are available with linear encoders, providing high positional accuracy and repeatability.

Linear Motor Driven Ultra Stages

Linear Motor Ultra Stages utilize a non-contact optical linear encoder, integrated directly into the stage footprint. The encoder tape scale is mounted upside-down and referenced directly off the bearing surface, eliminating any Abbe error and protecting it from any debris. The encoder read head is mounted inside the stationary base, eliminating moving wires.
• Sub-micron accuracy
• 0.5 micron repeatability
• Travels from 100 mm to 500 mm
• Patented AutoFlex™ Preload
• Built-in encoder and limits
• Optional open frame construction

U200 Linear Motor Driven:
• Closed frame design
• 200mm wide
• Maximum travel 400 mm
• Maximum load capacity 1,859 kg
• Maximum velocity to 1,500 mm/sec

U300 Linear Motor Driven:
• Available in closed-and open-frame design
• 300mm wide
• Maximum travel 500 mm
• Maximum load capacity 2187 kg
• Maximum velocity to 1,500 mm/sec

U400 Linear Motor Driven:
• Available in closed and open frame design
• 400mm wide
• Maximum travel 500 mm
• Maximum load capacity 2,187 kg
• Maximum velocity to 1,500 mm/sec

U600 Linear Motor Driven:
• Available in open frame design
• 600mm wide
• Maximum travel 500 mm
• Maximum load capacity 2 187 kg
• Maximum velocity to 1,500 mm/sec