Renishaw: TONiC™ UHV linear encoder readhead T1630-99M

TONiC UHV readheads take standard TONiC outstanding performance and deliver it in a readhead that has been designed and constructed using UHV compatible materials and processes making it suitable for UHV conditions down to 10-10 Torr.

The range of TONiC UHV encoders and accessories are constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA) making them suitable for many applications including wafer handling / testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

What is TONiC UHV?

TONiC UHV brings Renishaw's super-compact, non-contact encoder system to Ultra-High Vacuum applications offering customers improved motion control.

TONiC offers speeds up to 10 m/s and, combined with the Ti interface, resolutions down to 1 nm for both linear and rotary applications. TONiC systems are quick and simple to install with wide set-up tolerances and calibration at the push of a button. TONiC's dynamic signal processing gives improved signal stability with ultra-low sub-divisional error of typically <±30 nm to help realise superior motion control performance.

Features

Readhead size: 35 x 13.5 x 10 mm

Resolutions to 1 nm

Speed up to 10 m/s

Analogue or digital outputs

Ultra-low Sub-Divisional Error (SDE): typically < ±30 nm

Customer-selectable optical IN-TRAC™ reference mark

Benefits

Ultra-High Vacuum (UHV)

Narrow 6 mm wide scale suitable for space constrained applications

Substrate mastered scale giving improved metrological performance

Super-compact encoder with dynamic signal conditioning for improved motion control

Cut to length convenience

High dirt and solvent immunity