ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm.

ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications

Precision-ground, high-accuracy lead screw

ATS1500 series provides a flexible platform that makes it an outstanding selection for use as a general purpose positioner.

ATS2000 is a compact, high-performance stage that is as accurate as it is reliable. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS2000 the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.

ATS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS5000 the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.

ATS5000WB was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS5000WB the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.