Aerotech: Linear Motor Drive Precision Stage (ALS130H Series)

Linear Stages

Aerotech manufactures a large selection of positioning stages including linear stage models that utilize our own brushless linear direct-drive servomotors, as well as ball-screw models driven with Aerotech brush or brushless rotary motors. Innovators in linear stage design, manufacture and integration, Aerotech builds linear positioning stages for high-performance applications in industrial robots, fiber optics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, laser micromachining, electronic manufacturing, and other industrial automation applications.

Aerotech linear stages are available in X, XY and XYZ combinations to meet your motion requirements.

ALS130H Mechanical-Bearing Direct-Drive Linear Stage

Design Features

The ALS130H, with its sub-nanometer resolution, superior bidirectional repeatability and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection and other demanding applications.

Linear Motor Drive

Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, wind up or "stiction" that is normally associated with a lead screw or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Exceptional Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls.

The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provide excellent in-position stability.

Superior Geometry

Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±1 μm over the entire travel.

Smooth Travel

Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life

Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment

ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Model No.: ALS130H-025, ALS130H-050, ALS130H-100, ALS130H-150