Aerotech: Linear Motor Drive Precision Stage (ANT130-L Series)

Linear Stages

Aerotech manufactures a large selection of positioning stages including linear stage models that utilize our own brushless linear direct-drive servomotors, as well as ball-screw models driven with Aerotech brush or brushless rotary motors. Innovators in linear stage design, manufacture and integration, Aerotech builds linear positioning stages for high-performance applications in industrial robots, fiber optics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, laser micromachining, electronic manufacturing, and other industrial automation applications.

Aerotech linear stages are available in X, XY and XYZ combinations to meet your motion requirements.

ANT130-L Series Single-Axis Linear Direct-Drive Nanopositioning Stages

Design Features

The ANT130-L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Noncontact Direct-Drive

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130-L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ANT130-L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130-L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Designed for Long Life

Like all stages in the Aerotech product family, the ANT130-L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.

Precision Alignment

ANT130-L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and vertical axis solutions.

Model No.: ANT130-035-L, ANT130-035-L-PLUS, ANT130-060-L, ANT130-060-L-PLUS, ANT130-110-L, ANT130-110-L-PLUS, ANT130-160-L, ANT130-160-L-PLUS