The users slide system takes over the steering between the scanning head and the scale tape

Non-contact optical scanning of the scale tape by the scanning head, thereby no mechanical retroactive effect on the slide system

Low space requirement and uncomplicated assembly

High traversing speed up to 10 m/s

Signal interpolation up to 100 times integrated in the measuring head or the connector and high resolution up to 50 nm

Large mounting tolerances

Automatic signal adjustment after mounting possible

High scale accuracy up to ±1 µm

High interpolation accuracy and low sensibility to contamination due to dynamic offset- and amplitude control

Reference signals with increment-precise repetitive accuracy independent to the reference marks’ approach

Defined thermal behaviour supported by our DOUBLEFLEX scale tapes

Production and inspection machines for the semiconductor industry

Linear units and linear drives

Coordinate tables

Measuring machines and measuring microscopes

Robotics

Precision devices in reprography

Precise machining

Positioning and measuring devices in medical technology

2D-compact system based on our approved sensor technology with multi-field scanning

20 µm grid constant on glass grid plate

Measuring range up to 105 x 89 mm

Detection of angular deviations up to max. ±10’ (optional)

Each with one integrated reference mark per measuring direction