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Numerik Jena: Incremental Linear Encoder (LIS 73-3 Series)
Numerik Jena: Incremental Linear Encoder (LIS 73-3 Series)
 
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Order #: LIS-73-3
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Description Specifications and Drawings
 

Numerik Jena: Sealed Linear Incremental Encoder (LIS 73-3 Series)


Our exposed linear encoders consist of a scanning head and a scale tape. These measuring systems are basically characterized by the
following main features:

  • The users slide system takes over the steering between the scanning head and the scale tape

  • Non-contact optical scanning of the scale tape by the scanning head, thereby no mechanical retroactive effect on the slide system

  • Low space requirement and uncomplicated assembly

  • High traversing speed up to 10 m/s

  • Signal interpolation up to 100 times integrated in the measuring head or the connector and high resolution up to 50 nm

  • Large mounting tolerances

  • Automatic signal adjustment after mounting possible

  • High scale accuracy up to ±1 µm

  • High interpolation accuracy and low sensibility to contamination due to dynamic offset- and amplitude control

  • Reference signals with increment-precise repetitive accuracy independent to the reference marks’ approach

  • Defined thermal behaviour supported by our DOUBLEFLEX scale tapes


Typical fields of application:

  • Production and inspection machines for the semiconductor industry

  • Linear units and linear drives

  • Coordinate tables

  • Measuring machines and measuring microscopes

  • Robotics

  • Precision devices in reprography

  • Precise machining

  • Positioning and measuring devices in medical technology


LI
S 73-3 Features:

  • Sealed measuring system based on our approved sensor technology with housing version 3

  • The steering between the measuring head and the measuring unit happens measuring system-internally

  • The measuring systems components are protected from contamination by an aluminum capsule and elastic sealing

  • Tilting or deviations of the driver perpendicular to the direction of measurement are balanced within ranges of large tolerance without measuring errors


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