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MicroE: Optical Linear Encoders (Mercury™ Series) High Vacuum
MicroE: Optical Linear Encoders (Mercuryâ„¢ Series) High Vacuum
 
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Order #: M1X00V


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MicroE: Optical Linear Encoders (Mercury™ Series)

High Vacuum | Compact Precision Encoders for High Vacuum Applications

Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.

Model: M1000V

Resolutions from 5µm to 78nm, 1Vpp analog interface with index, accuracy to +/-1 µm/m, rated for vacuum 10-8 Torr.

Product Benefits:

  • The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.

  • Miniature sensor fits into tight spaces

  • Wide alignment tolerance make for easy installation and setup

  • Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm

  • Low power consumption aids in thermal stability of the system


Model: M1500V

Resolutions from 5µm to 0.5µm, A-quad-B digital interface with index, accuracy to +/-1 µm/m, rated for vacuum 10-8 Torr.

Product Benefits:

  • The M1500V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.

  • Miniature sensor fits into tight spaces

  • Wide alignment tolerance make for easy installation and setup

  • Built-in interpolation produces digital outputs with up to 0.5μm resolution

  • Low power consumption aids in thermal stability of the system


Model No.: M1000-MV, M1550V-04, M1550V-08, M1550V-20, M1550V-40


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