Aerotech: Linear Motor Drive Precision Stage (MPS75SLE Series)

Linear Stages

Aerotech manufactures a large selection of positioning stages including linear stage models that utilize our own brushless linear direct-drive servomotors, as well as ball-screw models driven with Aerotech brush or brushless rotary motors. Innovators in linear stage design, manufacture and integration, Aerotech builds linear positioning stages for high-performance applications in industrial robots, fiber optics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, laser micromachining, electronic manufacturing, and other industrial automation applications.

Aerotech linear stages are available in X, XY and XYZ combinations to meet your motion requirements.

MPS75SLE Mechanical-Bearing, Ball-Screw Stage with Linear Encoder

Design Features

Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.

Ultra-Precise Design

The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.

Highly Configurable

The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.

An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.

Model No.: MPS75SLE-025, MPS75SLE-050, MPS75SLE-075, MPS75SLE-100